Multi-step Cu seed layer formation for improving sidewall coverage

ABSTRACT

A method of forming an integrated circuit structure includes forming a dielectric layer; forming an opening in the dielectric layer; performing a first deposition step to form a seed layer in a first chamber; and performing a first etch step to remove a portion of the seed layer. The method may further include performing a second deposition step to increase the thickness of the seed layer. At least one of the first etch step and the second deposition step is performed in a second chamber different from the first chamber.

CROSS-REFERENCE TO RELATED APPLICATION

This application is related to commonly assigned U.S. Patent ApplicationSerial No. 12/031,108, filed Feb. 14, 2008, and entitled “In Situ CuSeed Layer Formation for Improving Sidewall Coverage,” which applicationis incorporated herein by reference.

TECHNICAL FIELD

This invention is related generally to integrated circuits, and moreparticularly to structures and formation methods of interconnectstructures, and even more particularly to the improvement in thesidewall coverage of seed layers of metal lines.

BACKGROUND

In integrated circuit art, a commonly used method for forming metallines and vias is known as “damascene.” Generally, this method involvesforming an opening in a dielectric layer, which separates the verticallyspaced metallization layers. The opening is typically formed usingconventional lithographic and etching techniques. After the formation,the opening is filled with copper or copper alloys. Excess copper on thesurface of the dielectric layer is then removed by a chemical mechanicalpolish (CMP). The remaining copper or copper alloy forms vias and/ormetal lines.

Copper is commonly used in the damascene structures because of its lowresistivity. Typically, copper is electro plated into damasceneopenings. As is well known in the art, in order to plate copper, a seedlayer is required to provide a low-resistance electrical path, and henceto enable uniform electro-plating over the wafer surface, so that copperions in the plating solution can be deposited.

FIG. 1 illustrates a cross-sectional view of an intermediate stage inthe formation of a conventional damascene structure. Trench opening 10is formed in low-k dielectric layer 2, followed by the blanket formationof diffusion barrier layer 4. Next, copper seed layer 6 (includingportions 6 ₁, 6 ₂, 6 ₃ _(—) ₁, and 6 ₃ _(—) ₂) is formed, either byphysical vapor deposition (PVD), or by electroless plating. FIG. 1illustrates a typical profile of seed layer 6 formed of PVD. Due to thefact that copper atoms are deposited downwardly, horizontal seed layerportions 6 ₁ and 6 ₂, which are over low-k dielectric layer 2 and intrench opening 10, respectively, are much thicker than portions 6 ₃ _(—)₁ and 6 ₃ _(—) ₂ on sidewalls of trench opening 10. Furthermore, anecking effect often occurs, so that on the sidewalls of trench opening10, top portions 6 ₃ _(—) ₁ of seed layer 6 are thicker than bottomportions 6 ₃ _(—) ₂, resulting in overhangs. The non-uniformity in theprofile of seed layer 6 will adversely affect the quality of thesubsequently performed electro plating.

Besides the adverse profile of seed layer 6 in the trench openings,asymmetry effects also result, and the asymmetry effects depend on therelative position of the trench opening on a wafer. For example, for atrench opening located close to an edge of a wafer, the side of thetrench opening closer to the center of the wafer and the side closer tothe edge of the wafer may have significantly different sidewall seedlayer thicknesses. Also, overhangs of seed layers are more severe at thecenter portion of the wafer than at the edge portions. Further, thethickness of sidewall seed layer closer to the edge of the wafer isoften less then those closer to the center of the wafer. All theseasymmetry effects adversely affect the performance and reliability ofthe resulting interconnect structure.

One of the methods for reducing the above-discussed non-uniformity in aseed layer profile is to reduce the deposition rate of seed layer 6, forexample, using very small power and/or adopting very low pressure in theprocess chamber. As a result, the throughput becomes very low, and hencethis method is not suitable for mass production. New methods forimproving the uniformity of seed layers without sacrificing thethroughput are thus needed.

SUMMARY OF THE INVENTION

In accordance with one aspect of the present invention, a method offorming an integrated circuit structure includes forming a dielectriclayer; forming an opening in the dielectric layer; performing a firstdeposition step to form a seed layer in a first chamber; and performinga first etch step to remove a portion of the seed layer. The method mayfurther include performing a second deposition step to increase thethickness of the seed layer. At least one of the first etch step and thesecond deposition step is performed in a second chamber different fromthe first chamber.

In accordance with another aspect of the present invention, a method offorming an integrated circuit structure includes providing asemiconductor substrate; forming a dielectric layer over thesemiconductor substrate; forming an opening in the dielectric layer;blanket forming a diffusion barrier layer, wherein the diffusion barrierlayer extends into the opening; and performing a deposition-etch cycle.The deposition-etch cycle includes performing a first deposition step toform a seed layer on the diffusion barrier layer; and in-situ performinga first etch step to reduce a thickness of the seed layer. The methodfurther includes, after the first etch step, performing a seconddeposition step to increase the thickness of the seed layer; andperforming an electro plating to form a metallic material on the seedlayer, wherein the metallic material fills the opening. At least one ofthe first etch step and the second deposition step is performed in adifferent chamber than the first deposition step

In accordance with yet another aspect of the present invention, a methodof forming an integrated circuit structure includes providing asemiconductor substrate; forming a dielectric layer over thesemiconductor substrate; forming an opening in the dielectric layer;blanket forming a diffusion barrier layer, wherein the diffusion barrierlayer extends into the opening; and performing a first deposition-etchcycle in a first chamber. The first deposition-etch cycle includesperforming a first deposition step to form a seed layer on the diffusionbarrier layer; and performing a first etch step to reduce a thickness ofthe seed layer. The method further includes performing a seconddeposition-etch cycle including performing a second deposition step toincrease the thickness of the seed layer; and performing a second etchstep to reduce the thickness of the seed layer. The method furtherincludes performing an electro plating to form a metallic material onthe seed layer, wherein the metallic material fills the opening. Thesecond deposition-etch cycle is performed in a second chamber differentfrom the first chamber.

An advantageous feature of the present invention includes improvedconformity of seed layers, and hence improved quality of the resultingmetal lines.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1 illustrates a cross-sectional view of an intermediate stage inthe formation of a conventional damascene structure, which includes anon-conforming seed layer;

FIGS. 2 through 3 and FIGS. 5 through 9 are cross-sectional views ofintermediate stages in the manufacturing of an interconnect structure;

FIG. 4 illustrates a production tool for forming a seed layer in theformation of an interconnect structure; and

FIG. 10 illustrates a production tool including more than one chamber,wherein the production tool is used for the multi-step seed layerformation.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the presently preferred embodiments arediscussed in detail below. It should be appreciated, however, that thepresent invention provides many applicable inventive concepts that canbe embodied in a wide variety of specific contexts. The specificembodiments discussed are merely illustrative of specific ways to makeand use the invention, and do not limit the scope of the invention.

Methods for forming metal lines with seed layers having improvedsidewall coverage are provided. The intermediate stages of manufacturingembodiments of the present invention are illustrated. Throughout variousviews and illustrative embodiments of the present invention, likereference numbers are used to designate like elements.

Referring to FIG. 2, wafer 110 is provided, which includes schematicallyillustrated base structure 20, and dielectric layer 22 over basestructure 20. Base structure 20 may include a semiconductor substrate,referred to herein as 20 ₁, and overlying layers 20 ₂, which may includea contact etch stop layer (ESL), an inter-layer dielectric (ILD), andinter-metal dielectrics (IMD), in which metallization layers (not shown)are formed. Semiconductor substrate 20 ₁ may be a single crystalline ora compound semiconductor substrate. Active and passive devices (notshown), such as transistors, resistors, and inductors, may be formed onsemiconductor substrate 20 ₁. Opening 26 is formed in dielectric layer22. In an exemplary embodiment, opening 26 is a trench opening forforming a metal line, and preferably has a width of less than about 90nm. Alternatively, opening 26 may be a via opening, a contact opening,or the like.

In an exemplary embodiment, dielectric layer 22 has a low dielectricconstant (k value), preferably lower than about 3.5, hence is referredto as low-k dielectric layer 22 throughout the description. Morepreferably, low-k dielectric layer 22 has a k value of less than about2.8, and hence is sometimes referred to as an extra low-k (ELK)dielectric layer. Low-k dielectric layer 22 may include commonly usedmaterials such as fluorinated silicate glass (FSG), carbon-containingdielectric materials, and may further contain nitrogen, hydrogen,oxygen, and combinations thereof. A porous structure may exist in low-kdielectric layer 22 for lowering its k value. The thickness of low-kdielectric layer 22 may be between about 100 Å and about 1 μm. Oneskilled in the art will realize, however, that the dimensions recitedthroughout the description are related to the technology used forforming the integrated circuits, and may be scaled to suit the scale ofthe forming technology. Low-k dielectric layer 22 may be formed usingchemical vapor deposition, spin-on, or other commonly used methods.

FIG. 3 illustrates the formation of (diffusion) barrier layer 30.Barrier layer 30 preferably includes titanium, titanium nitride,tantalum, tantalum nitride, or other alternatives, and may be formedusing physical vapor deposition (PVD) or one of the commonly usedchemical vapor deposition (CVD) methods. The thickness of barrier layer30 may be between about 20 Å and about 200 Å.

Next, a seed layer is formed on barrier layer 30. FIG. 4 illustratesproduction tool 100 for forming the seed layer. Production tool 100includes chamber 102 and power source 104 connected into chamber 102.Target 108 and wafer 110 are preferably placed facing each other. Target108 is formed of the desirable materials for forming the seed layer.Preferably, target 108 includes copper or a copper alloy, which mayinclude aluminum as an alloying material. Alternatively, target 108 maybe formed of other metals such as ruthenium or a ruthenium alloy. Wafer110 is preferably held by electrostatic chuck (ESC) 115, which provideselectrostatic charges clamping wafer 110 to itself without mechanicalfasteners. Power source 106 is connected to ESC 115, wherein powersource 106 may be a radio frequency (RF) power source or a DC powersource.

RF coil 112 is wrapped around the region directly over wafer 110, whichregion is preferably in a close proximity to wafer 110. RF power source116 is connected to RF coil 112, which is used to generate and/orimprove the ionization of argon and copper ions. In an exemplaryembodiment, power source 116 applies a RF power having a frequency of 2MHz. Electromagnets 114, often referred to as bottom inside magnet (BIM)and/or bottom outside magnet (BOM), are deployed surrounding the regiondirectly over wafer 110. Preferably, BIM/BOM 114 is also in proximity towafer 110, and may be wrapped around RF coil 112. BIM/BOM 114 helps toimprove the uniformity in the deposition and/or etching processes.

Power sources 104 and 106 may be operated independently from each other.Each of the power sources 104 and 106 may be independently powered onand off without affecting the other. Preferably, the connection of eachof the power sources 104 and 106 may be switched in polarity to eithercause a deposition on wafer 110, or cause an etching on wafer 110. Asone skilled in art will realize, whether a power source performs adeposition function or an etching function is determined by how thepower source is connected, and to which of the target side or the waferside it is connected to. In an exemplary embodiment, a DC power sourceis connected to target 108 side, and a RF power source is connected towafer 110 side. Alternatively, the RF power source 106 may be connectedto target 108 side, while the DC power source 104 may be connected towafer 110 side. Power sources 104 and 106 may also be replaced by otherpower sources for bias sputter, magnetron sputter, ion metal plasma(IMP) sputter, and the like, and may be connected in differentcombinations. For the purpose of simplifying the following discussions,the exemplary power source 104 is referred to as a DC power source, andthe exemplary power source 106 is referred to as a RF power source.Further, it is assumed the DC power source 104 has its negative endconnected to the target 108 side, as is shown in FIG. 4, and hence DCpower 104 performs the deposition function. Accordingly, RF power source106 may perform the etching function.

Using production tool 100 as illustrated in FIG. 4, seed layer 32 isformed on diffusion barrier layer 30, as is shown in FIG. 5. Optionally,before the formation of seed layer 32, barrier layer 30 is pre-cleaned,which may be performed in a production tool similar to the one shown inFIG. 4, except power source 104 is not turned on. In this case, RF powersource 106 causes a light etch of the top surface of barrier layer 30.Alternatively, the pre-clean is performed in a separate chamber otherthan chamber 102. The pre-clean advantageously improves the surfacetexture of barrier layer 30, so that the subsequently formed seed layer32 may be more conformal.

Next, a deposition step is performed, mainly caused by power source 104.In an exemplary deposition process, argon is first introduced intochamber 102 with a low pressure. DC power source 104 is turned on toionize argon, generating argon plasma. The positively charged argon ionsare attracted to the negatively charged target 108, causing abombardment of target 108. Copper ions are thus sputtered from target108, and deposited onto wafer 110, forming seed layer 32. After theargon plasma is started, the argon flowing into chamber 102 may beturned off. Seed layer 32 may have a thickness of between about 200 Åand about 1200 Å. In an exemplary embodiment, the power of DC powersource 106 is between about 20 KW and about 60 KW, and an exemplarythickness T1 of a portion of seed layer directly over low-k dielectriclayer 22 is about 300 Å.

Seed layer 32 includes portions 32 ₁ directly on low-k dielectric layer22, portions 32 ₂ on sidewalls of, and close to, the top of opening 26,portions 32 ₃ on sidewalls of, and close to, the bottom of opening 26,and portion 32 ₄ at the bottom of opening 26. If seed layer 32 is formedby turning RF power source 106 off, the resulting seed layer 32 istypically highly non-conformal (with poor sidewall coverage) withdifferent portions of seed layer 32 have significantly differentthicknesses. For example, thicknesses T1 and T4 of respective horizontalportions 32 ₁ and 32 ₄ will be significantly greater than thicknesses T2and T3 of respective sidewall portions 32 ₂ and 32 ₃. Thickness T2 ofportion 32 ₂ is also typically greater than thickness T3 of portion 32₃. The excess portions 32 ₂ hanging beyond portions 32 ₃ are oftenreferred to as overhangs.

During the deposition of seed layer 32, power 116 may be turned on toimprove the direction of ions. Further, RF power 106 may be turned on tofurther increase the re-sputtering rate. In this case, DC power 104outputs a power greater than that of RF power 106, and hence the neteffect is deposition.

Although the re-sputtering in the deposition step has the effect ofimproving the sidewall coverage (and the conformity) of seed layer 32.The resulting conformity may still not be satisfactory. In the resultingstructure (refer to FIG. 5), thicknesses T1 and T4 may still be greaterthan thicknesses T2 and T3, and thickness T2 may still be greater thanthickness T3. An etch step is thus performed, resulting in a structureschematically shown in FIG. 6.

In an embodiment, the etch step is performed by turning off the power ofDC power source 104, and turning on the power of RF power source 106. Inalternative embodiments, the etch step may be performed by connectingthe positive end of DC power 104 to target 108. In yet otherembodiments, the etch step may be performed by using a similarproduction tool for the pre-clean process. In an exemplary embodiment,the power of RF power source 106 is between about 0.2 KW and about 1 KW,and the power of RF power source 116 is between about 1 KW and about 2KW.

Referring back to FIG. 5, the etch step may result in three possibleeffects; the thicknesses T1 and T4 of seed layer 32 are reduced; theoverhangs 32 ₅ are sputtered away; and a top layer 32 ₆ of bottom seedlayer 32 ₄ is re-sputtered onto portions 32 ₃ and possibly portions 32₂, as schematically illustrated by arrows 35. These three effects incombination generate a net effect of thinning thicker portions andthickening thinner portions of seed layer 32. As a result, seed layer 32has an improved conformity.

The deposition step and the etch step discussed in the precedingparagraphs in combination are referred to as a deposition-etch cycle.After the first deposition-etch cycle, a second deposition step may beperformed, which may further be followed by a second etch step. Thedeposition-etch cycles may be repeated. Preferably, for each of theadditional deposition-etch cycles, the thicknesses T1′ and T4′ areincreased over the preceding deposition-etch cycle. Alternatively, anadditional deposition-etch cycle may result in the reduction inthicknesses T1′ and T4′ over the preceding deposition-etch cycle.However, each additional deposition-etch cycle will cause the increasein the thickness T3′, and hence results in a more conformal seed layer32. The repetition of the deposition-etch cycles eventually results insubstantially equal thicknesses T1′, T2′, T3′, and T4′. Advantageously,by dividing one deposition-etch cycle into a plurality ofdeposition-etch cycles, the profile of seed layer 32 may be fixed beforeexcess non-uniformity is resulted.

With more seed layer 32 etched, seed layer 32 is more conformal.However, care needs to be taken to ensure that the bottom seed layerportion 32 ₄ is not etched through. Preferably, after the etch step, aratio of thickness T4′ to thickness T4, which reflects how muchpercentage of seed layer 32 is removed in the etch step, is less thanabout 50%, and more preferably less than about 30%. In an exemplaryembodiment, after the etch step, thickness T1′ is about 150 Å. Althoughwith a smaller T4′/T4 ratio, the profile of seed layer 32 is moreconformal, more deposition-etch cycles are needed to achieve desirablethickness T4′.

Optionally, after all deposition-etch cycles are performed, a flashdeposition step is performed to conclude the formation of seed layer 32,for example, using essentially the same production tool and powersetting as the deposition steps discussed in the preceding paragraphs.However, the flash deposition step is only performed briefly, and theresulting seed layer 32 may be increased in thickness by only about 100Å to about 200 Å. The flash deposition may replenish seed layer 32 insome corner regions, in case these corner regions are substantiallyetched-through in the preceding etch step.

With multiple deposition and etch steps, however, the productionthroughput may be significantly reduced, and the formation of seed layer32 may become a bottleneck of the production. In addition, someproduction tools may be capable of performing only one of the depositionand etch steps, and hence the deposition-etch cycle may have to beaccomplished in different chambers. Accordingly, more than one chambermay be used, and the respective formation of seed layer 32 is referredto as multi-step formation. In a first embodiment, the deposition stepand the etch step are performed in two chambers, with one chamberperforming the deposition step only, and the other chamber performingthe etch step only. In this case, the production tools only need one ofthe power sources 104 and 106, depending on the task to perform. Inalternative embodiments, a deposition-etch cycle is performed in onechamber 102, while some other steps, which may include either adeposition step or a deposition-etch cycle, are performed in anotherchamber(s). With more deposition-etch cycles, more chambers may beadded.

FIG. 10 illustrates an exemplary production tool 200 for performingmulti-step formation of seed layer 32. Production tool 200 includestransfer chamber 202 for transferring wafers, and chambers 204, 206, and208. Each of the chambers 204, 206 and 208 may be used to perform eitherone, or both, of the deposition and etch steps. After one of the stepsis finished in one of the chambers 204, 206, and 208, the wafers may betransferred between chambers 204, 206 and 208 through transfer chamber202. Production tool 200 further includes loadlock 210 for loadingwafers into, and unloading the wafers from, transfer chamber 202. Duringthe transferring, chambers 202, 204, 206, and 208 are preferably keptvacuumed. Accordingly, the multi-step seed layer formation may beperformed with no vacuum break between any of the deposition and etchsteps.

Next, as shown in FIG. 7, copper 40 is filled into the remaining portionof opening 26. In the preferred embodiment, copper 40 is formed usingelectro plating, wherein wafer 110 is submerged into a plating solution,which contains ionized copper. Due to improved uniformity of seed layer32, voids are less likely to be formed in opening 26 (refer to FIG. 6).

Referring to FIG. 8, a chemical mechanical polish (CMP) is performed toremove excess portions of copper 40, seed layer 32, and barrier layer 30over low-k dielectric layer 22, leaving copper line 42 and portions ofbarrier layer 30 and seed layer 32 in opening 26. The remaining portionof barrier layer 30 and seed layer 32 are referred to as barrier layer41 and seed layer 43, respectively.

FIG. 8 also illustrates the formation of metal cap 44 and etch stoplayer (ESL) 46. Metal cap 44 may be formed of CoWP or other commonlyused materials. ESL 46 may be formed of a dielectric material,preferably having a dielectric constant of greater than about 3.5, andmay include materials such as silicon nitride, silicon carbide, siliconcarbonitride, silicon carbon-oxide, CH_(x), CO_(y)H_(x), andcombinations thereof. The details for forming metal cap 44 and ESL 46are well known in the art, and hence are not repeated herein.

The teaching provided in the preceding paragraphs is readily applicablefor use in dual damascene processes. FIG. 9 illustrates a dual damascenestructure, which includes barrier layer 41 and seed layer 43. Seed layer43 is formed using essentially the same method as taught in precedingparagraphs. Copper line 42 and via 50 are filled in the opening,preferably by electro plating. Similar to the single damascene process,by applying the teaching of the present invention into the formation ofseed layer 43, seed layer 43 also has improved conformity, and hence thequality of metal line 42 and via 50 is improved.

The embodiments of the present invention have several advantageousfeatures. By incurring re-sputtering in the deposition steps, theconformity of the resulting seed layers is significantly improved. Thesubsequent etch steps further improve the conformity of the resultingseed layers. The resulting seed layers are substantially overhang-free.The asymmetry between metal lines in the center portions and metal linesin the edge portions of wafer is also reduced. Furthermore, the seedlayers may be formed using more than one chamber, and hence thethroughput of the manufacturing process is not affected.

Although the present invention and its advantages have been described indetail, it should be understood that various changes, substitutions andalterations can be made herein without departing from the spirit andscope of the invention as defined by the appended claims. Moreover, thescope of the present application is not intended to be limited to theparticular embodiments of the process, machine, manufacture, andcomposition of matter, means, methods steps described in thespecification. As one of ordinary skill in the art will readilyappreciate from the disclosure of the present invention, processes,machines, manufacture, compositions of matter, means, methods, or steps,presently existing or later to be developed, that perform substantiallythe same function or achieve substantially the same result as thecorresponding embodiments described herein may be utilized according tothe present invention. Accordingly, the appended claims are intended toinclude within their scope such processes, machines, manufacture,compositions of matter, means, methods, or steps.

1. A method of forming an integrated circuit structure comprising:forming a dielectric layer over a semiconductor substrate; forming anopening in the dielectric layer; performing a first deposition step toform a seed layer in a first chamber, wherein the seed layer comprises afirst portion in the opening, and a second portion over the dielectriclayer; and performing a first etch step to remove a portion of the seedlayer in a second chamber different from the first chamber, wherein thefirst chamber and the second chamber are vacuum chambers.
 2. The methodof forming the integrated circuit structure according to claim 1,wherein the first deposition step and the first etch step are performedwith no vacuum break therebetween.
 3. The method of forming theintegrated circuit structure according to claim 1, further comprisingperforming a second deposition step in one of the first and the secondchambers.
 4. The method of forming the integrated circuit structureaccording to claim 3, further comprising, after the second depositionstep, performing a second etch step in one of the first and the secondchambers.
 5. The method of forming the integrated circuit structureaccording to claim 1, wherein the first deposition step comprises asimultaneous re-sputtering.
 6. The method of forming the integratedcircuit structure according to claim 1, wherein the first etch stepcomprises applying a RF power to a RF coil, and wherein the RF coil iswrapped horizontally around a region directly over the integratedcircuit structure, and applying an additional RF power to incur etching.7. The method of forming the integrated circuit structure according toclaim 1, wherein the first etch step comprises sputtering a top layerfrom the first portion of the seed layer, and wherein a bottom layerdirectly underlying the top layer is not sputtered.
 8. A method offorming an integrated circuit structure comprising: forming a dielectriclayer over a semiconductor substrate; forming an opening in thedielectric layer; performing a first deposition step to form a seedlayer in a first chamber; performing a second deposition step in one ofthe first and a second chamber; and performing an etch step in one ofthe first and the second chambers, wherein the second deposition stepand the etch step in combination result in a decrease in a thickness ofa bottom portion of the seed layer at a bottom of the opening.
 9. Amethod of forming an integrated circuit structure comprising: providinga semiconductor substrate; forming a dielectric layer over thesemiconductor substrate; forming an opening in the dielectric layer;blanket forming a diffusion barrier layer, wherein the diffusion barrierlayer extends into the opening; performing a deposition-etch cyclecomprising: performing a first deposition step to form a seed layer onthe diffusion barrier layer, wherein the first deposition step isperformed; and in-situ performing a first etch step to reduce athickness of the seed layer; after the first etch step, performing asecond deposition step to increase the thickness of the seed layer,wherein at least one of the first etch step and the second depositionstep is performed in a different chamber than the first deposition step;and performing an electro plating to form a metallic material on theseed layer, wherein the metallic material fills the opening.
 10. Themethod of forming the integrated circuit structure according to claim 9,wherein the first deposition step is performed using a first powersource to generate a deposition effect, and wherein the first etch stepis performed using a second power source to generate an etch effect. 11.The method of forming the integrated circuit structure according toclaim 10, further comprising, before the deposition-etch cycle, turningon the second power source and turning off the first power source toperform a pre-clean on a surface of the diffusion barrier layer.
 12. Themethod of forming the integrated circuit structure according to claim 9,wherein the first etch step comprises: applying a RF power to a RF coilaround a region directly over the semiconductor substrate, and applyingan additional RF power to an electrostatic chuck underlying thesemiconductor substrate.
 13. The method of forming the integratedcircuit structure according to claim 9, further comprising a second etchstep after the second deposition step.
 14. The method of forming theintegrated circuit structure according to claim 9, further comprising,after the step of electro plating, performing a flash deposition. 15.The method of forming the integrated circuit structure according toclaim 9, wherein the first etch step comprises sputtering a top layer ofthe seed layer from inside the opening, and wherein a bottom layerdirectly underlying the top layer is not sputtered.
 16. A method offorming an integrated circuit structure comprising: providing asemiconductor substrate; forming a dielectric layer over thesemiconductor substrate; forming an opening in the dielectric layer;blanket forming a diffusion barrier layer, wherein the diffusion barrierlayer extends into the opening; performing a first deposition-etch cyclein a first chamber, the first deposition-etch cycle comprising:performing a first deposition step to form a seed layer on the diffusionbarrier layer; and performing a first etch step to reduce a thickness ofthe seed layer; performing a second deposition-etch cycle comprising:performing a second deposition step to increase the thickness of theseed layer; and performing a second etch step to reduce the thickness ofthe seed layer, wherein the second deposition-etch cycle is performed ina second chamber different from the first chamber; and performing anelectro plating to form a metallic material on the seed layer, whereinthe metallic material fills the opening.
 17. The method of forming theintegrated circuit structure according to claim 16, wherein the firstand the second deposition-etch cycles are performed with no vacuum breaktherebetween.
 18. The method of forming the integrated circuit structureaccording to claim 16, wherein the second deposition-etch cycle resultsin an increase in a bottom thickness of the seed layer.
 19. The methodof forming the integrated circuit structure according to claim 16,wherein the second deposition-etch cycle results in a decrease in abottom thickness of the seed layer.